Vacuum Coating Equipment |
| Vacuum unit VU-2M |
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Technical data:
- Chamber pressure (ultimate vacuum): 6·10-4
- Internal chamber diameter: 700 mm
- Number of vaporizers
- cathode-ray (ELI): 2
- resistive (RI): 1
- Maximum power of cathode-ray vaporizer: 6 kVt
- Maximum power of resistive vaporizer: 4 kVt
- Maximum allowable diameter of optical component: 500 mm
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| Ion ray fabrication module ILO-200 |
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Technical data:
- External aperture of ion beam: 200 mm
- Maximum ion beam current density: 0.5 mA/sm2
- Ion energy: 0.1 ... 1.5 keV
- Irregularity of current density within external aperture: 5%
- Divergence angle of ion ray: 5 ... 10°
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Vacuum camera technical equipment
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Tools - masks for vacuum formation of the
optical surfaces
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Tool - mask for ion ray formation
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